Study on Process Parameters of High Aspect Ratio β-Si3N4 Seed by Corrosion Template Method

Abstract: The silicon nitride ceramic thin plate was subjected to molten alkali etching treatment by etching template method to obtain β-Si3N4 seed crystal.The effects of corrosive media and time on grain morphology and dispersion were investigated.The three methods of ultrasonic stripping , magnetic stirring and grinding were optimized .It was confirmed that the magnetic stirring method is the best stripping process .The product was observed by XRD and SEM .The results show that the obtained seeds were high -purity β-Si3N4 with a particle size range of 2-10 μm and a maximum aspect ratio of 10 or more.

Key words: corrosion template method ; β-Si3N4 seed crystal; silicon nitride casting substrate

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