Abstract：Nb-doped TiO2 （NTO）ceramic targets were prepared by spark plasma sintering （SPS）.The properties of NTO ceramic target samples were characterized by X -ray diffraction analysis， scanning electron microscopy and four probe testers .The effect of Nb content at 1100 ℃ on the density， flexural strength， resistivity， surface morphology and microstructure of NTO ceramic target was studied .The experimental results show that the different amounts of Nb doping have a significant effect on the performance of NTO ceramic targets.With the increasing of Nb doping content ，the relative density，flexural strength and electrical resistance of NTO ceramic targets sintered at 1100 ℃ first increase and then gradually decreased ，at 5wt％ doping amount reached the maximum ，and at this time the crystal intact，uniform grain size distribution.Taken together，5wt％ Nb doped NTO ceramic targets exhibited the best performance with resistivity of 13.23 mΩ· cm， flexural strength of 139.1 MPa and relative density of 99.9％.
Key words：ceramic target；doping amount；SPS sintering；TiO2
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